By Dieter Bäuerle
Laser Processing and Chemistry offers an summary of the basics and purposes of laser-matter interactions, specifically in regards to laser fabric processing. specific consciousness is given to laser-induced actual and chemical tactics at gas-solid, liquid-solid, and solid-solid interfaces. beginning with the history physics, the ebook proceeds to check purposes of laser options in micro-machining, and the patterning, coating, and amendment of fabric surfaces. This fourth variation has been revised and enlarged to hide new subject matters resembling 3D microfabrication, advances in nanotechnology, ultrafast laser expertise and laser chemical processing (LCP).
Graduate scholars, physicists, chemists, engineers, and brands alike will locate this booklet a useful reference paintings on laser processing.
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Extra info for Chemical Processing with Lasers
Photochemical bond-breaking can be based on dissociative electronic excitations, which are located in the visible and ultraviolet spectral region, or on seteetive multiphoton vibrational excitations by means of infrared radiation. An indirect mechanism is to transfer the bond-breaking energy via an intermediate species as, for example, in photosensitization. Clearly, single- or multi photon dissociation of molecules based on direct or indirect electronic excitation is a nonthermal and very common process.
Hydrides such as SiH 4 , Si2H6, GeH4, CH4, C2H2 are used for deposition of Si, Ge and C. 3). AsH3' B2H6, and PH3 are used as precursors for silicon doping. Direct photochemica1 decomposition of silicon hydrides can occur only for wave1engths of 1ess than 200 nm. PERKINS et a1. 96J have studied the 147 nm photolysis of SiH 4 , using a Xe resonance 1amp. 2). The shortest laser wavelength that has been used for the decomposition of SiH 4 is 193 nm. 1). At 193 nm. SiH4 has negligible linear absorption.
Thi s i nterpretat ion i s supported by the compari son of 33 relaxation times. For typical conditions (an absorbed laser power of 1 W/cm 2 , agas pressure of p(Si H4) = 10 mbar and agas temperature of 10 3 K) the excitati on rate for a mol ecul e is ab out We '" 10 3 s-l; and the average time between rate is collisions about about l;'v-T '" 10- 8 s. The vibrational-translational relaxation 104 s-l. 33) seems to be readily fulfi11 ed. 116-119J. In spite of the fact that in LCP most reactions induced by infrared laser light are nonselective, there are some clear exceptions.
Chemical Processing with Lasers by Dieter Bäuerle