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Extra info for Istfa ’99: Proceedings of the 25th International Symposium for Testing and Failure Analysis 14-18 November 1999 Westin Hotel Santa Clara, California
The laser power range is typical for that used in the optical probing system. Figure 6 Circuit schematics for a CMOS inverter (a) photocurrent induced when probing a p-channel diffusion, charging the node, and (b) photocurrent induced when probing an n-channel device, discharging the node. Data collected on the output p- and n-diffusion show no perceptible timing shift, indicating the lack of invasiveness on waveform acquisition for the probing laser At the highest laser level, we estimate the peak power density of the probe laser to be around 500 MW/cm2.
5µm spacing. 5µm. Since the probe was intended to mount on a typical probe station, its imaging capability was not designed to be “metrology quality”. 18µm interconnect lines from each other in order to place the probe tip. The default imaging area is 40µm x 40µm and an image of the surface area is generated in under one minute. To ensure accurate placement of the probe-tip and obtain more detail of the DUT region of interest, the probe software enables the user to “zoom” the display to show a smaller region in greater detail.
Figure 1 Picosecond Imaging Circuit Analysis (PICA) system. The test consisted of an infinite loop of write commands, possible using the programmable RAMBIST. 2 ns, where it was passing (slow). The pattern was allowed to loop at each of these frequencies to acquire good CCD images of the suspect circuits. The same two tests were then run to provide good statistics for the PICA detector in order to view the timing behaviour of the suspect circuitry. Figure 3 Resulting subtracted image. Results PICA measurements were then used to derive the timing behaviour and the problem traced to a race between two signals to the write control circuits.
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