Regina Luttge's Nano- and Microfabrication for Industrial and Biomedical PDF

By Regina Luttge

ISBN-10: 0323378285

ISBN-13: 9780323378284

ISBN-10: 0323389287

ISBN-13: 9780323389280

Nano- and Microfabrication for commercial and Biomedical functions, moment Edition, specializes in the economic viewpoint on micro- and nanofabrication equipment, together with large-scale production, the move of options from lab to manufacturing unit, approach tolerance, yield, robustness, and value.

The publication supplies a historical past of miniaturization and micro- and nanofabrication, and surveys commercial fields of program, illustrating fabrication methods of proper micro and nano units. during this moment version, a brand new concentration quarter is nanoengineering as an immense motive force for the increase of novel functions via integrating bio-nanofabrication into microsystems. additionally, new fabric covers lithographic mold fabrication for soft-lithography, nanolithography recommendations, nook lithography, advances in nanosensing, and the constructing box of complicated sensible materials.

Luttge additionally explores the view that micro- and nanofabrication may be the key driving force for a "tech-revolution" in biology and scientific study that features a new case research that covers the constructing organ-on-chip concept.

  • Presents an interdisciplinary method that makes micro/nanofabrication available both to engineers and people with a existence technological know-how heritage, either in educational settings and advertisement R&D
  • Provides readers with directions for assessing the economic strength of any new expertise in response to micro/nanofabrication, therefore decreasing the funding risk
  • Updated version provides nanoengineering as an enormous driving force for the increase of novel functions through integrating bio-nanofabrication into microsystems

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Extra resources for Nano- and Microfabrication for Industrial and Biomedical Applications

Sample text

Copyright © 2000 Springer Science + Business Media, LLC. 11 Typical example of a microstructure generated by the Bosch process. G. Bomer, University of Twente, 2004. 4 ­INDUSTRIALLY ESTABLISHED NONSILICON PROCESSING Microsystems rely on shaping many materials into structural elements. During the last two to three decades many materials other than silicon have been used, either in surface micromachining, or as a thin film, or for components produced by bulk micromachining. Examples include piezoelectric SC-quartz, photostructurable glass, or plastics.

Control Symp. (1997) 552–565, with permission from IEEE 1997. 2 ­GLASS WET ETCHING Amorphous glasses, including fused silica, can be etched in a similar way to SC quartz. Examples are the isotropic etching of borosilicate glass in HF acid, in which a strip-opening in the masking layer will result in a hemispherical channel structure if sufficient etch time is allowed. 15 demonstrates the application of this technique to the fabrication of microfluidic channels [55]. Today, the research field of microfluidics already offers a broad range of industrial opportunities.

Surface micromachining utilizing PS is a key technology or so-called standard microfabrication process, now used to manufacture an extensive variety of devices. Micromotors were made possible by surface micromachining techniques that 1. Oxidation and patterning the sacrificial layer in CHF3 plasma 4. Second PS-layer deposition 3 µm-thick LPCVD polysilicon 4 µm-thick thermal oxide Substrate 2. First polysilicon (PS) deposition and patterning the rotor in CL2/CFCI3/Ar plasma 5. Patterning the stator 5.

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Nano- and Microfabrication for Industrial and Biomedical Applications by Regina Luttge


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