RF MEMS Switches and Integrated Switching Circuits: Design, - download pdf or read online

By Ai-Qun Liu (auth.)

ISBN-10: 0387462619

ISBN-13: 9780387462615

Microelectromechanical platforms (MEMS) stand poised for the subsequent significant leap forward within the silicon revolution that started with the transistor within the Sixties and has revolutionized microelectronics. MEMS let one not to purely detect and approach details of every kind from small scale platforms, but additionally to impact alterations in platforms and the surroundings at that scale. “RF MEMS Switches and built-in Switching Circuits” builds at the vast physique of literature that exists in learn papers on analytical and numerical modeling and layout in response to RF MEMS switches and micromachined switching circuits, and provides a unified framework of insurance. This quantity comprises, yet isn't constrained to, RF MEMS methods, advancements from RF MEMS switches to RF switching circuits, and MEMS swap elements in circuit structures. This booklet additionally: -Presents RF Switches and switching circuit MEMS units in a unified framework protecting all features of engineering innovation, layout, modeling, fabrication, keep watch over and experimental implementation -Discusses RF swap units intimately, with either approach and component-level circuit integration utilizing micro- and nano-fabrication innovations -Includes an emphasis on layout innovation and experimental relevance instead of uncomplicated electromagnetic concept and equipment physics “RF MEMS Switches and built-in Switching Circuits” is ideal for engineers, researchers and scholars operating within the fields of MEMS, circuits and platforms and RFs.

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Extra resources for RF MEMS Switches and Integrated Switching Circuits: Design, Fabrication, and Test

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F. Fierstal, “Some design considerations and realizations of iris-coupled YIG-tuned filters in the 12–40 GHz region,” IEEE Trans. Microwave Theory Tech. Vol. 18, 1970, pp. 205–212. 82. H. Tanbakuchi D. Nicholson, B. Kunz and W. Ishak, “Magnetically tunable oscillators and filters,” IEEE Trans. Magn. Vol. 25, 1989, pp. 3248–3253. 83. S. R. Chandler, L. C. Hunter and J. C. Gordiner, “Active varactor tunable bandpass filters,” IEEE Microwave Guided Wave Lett. Vol. 3, 1993, pp. 70–71. 84. A. R. Brown and G.

16) where E2 is Young’s modulus of the mass and I2 is the moments of inertia of the cross-sectional area of the mass. Before the metal coating, the beam is merely made up of single-crystal silicon. 17c) where ESi is Young’s modulus of the single-crystal silicon. After the metal coating, the beam is made of single-crystal silicon covered by metal on the top and sidewalls. 18d) where Em is Young’s modulus of the metal, wm is the thickness of the metal coated at sidewalls of the silicon beam. 2. 5–3 μm, w2 = 5–15 μm, wm ≤ 1 μm.

Hofer, “Tunable microwave and millimeter-wave bandpass filters,” IEEE Trans. Microwave Theory Tech. Vol. 39, 1991, pp. 643–653. 77. J. B. Tsui, Microwave Receivers with Electronic Warfare Applications, Wiley, New York, NY, 1992. 78. H. , Rome, Italy, Sept. 1987, pp. 482–490. 79. R. W. de Greese, “Low-loss gyromagnetic coupling through single crystal garnets,” J. Appl. Phys. Vol. 30, 1958, pp. 1555–1559. 80. P. S. Carter, “Equivalent circuit of orthogonal-loop-coupled magnetic resonance filters and bandwidth narrowing due to coupling resonance,” IEEE Trans.

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RF MEMS Switches and Integrated Switching Circuits: Design, Fabrication, and Test by Ai-Qun Liu (auth.)

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